Dichlorosilane Gas Detector

$2,170.00

Product Summary

The PureAire Dichlorosilane Fixed Gas Detector is a critical safety solution for facilities requiring continuous monitoring of dichlorosilane (SiH₂Cl₂) gas. Designed to connect with a dedicated, renewable toxic gas sensor calibrated for dichlorosilane in parts-per-million (ppm), this system delivers accurate, real-time gas detection to protect both personnel and equipment.

Dichlorosilane is commonly used in semiconductor manufacturing, thin film deposition, and photovoltaic cell production, particularly in processes like chemical vapor deposition (CVD) for silicon-based devices. Due to its high toxicity, flammability, and reactivity with moisture, continuous monitoring is essential in cleanroom and high-tech fabrication environments.

PureAire’s dichlorosilane sensors are built for extended life—lasting up to 8 years under normal cleanroom conditions—and are rechargeable on-site with electrolyte, helping reduce maintenance needs and long-term costs.

For semiconductor and advanced manufacturing facilities utilizing dichlorosilane, PureAire offers a robust, reliable, and low-maintenance gas detection system that ensures a safe working environment and uninterrupted process control.

Please note that because of the nature of this product, the lead time is typically 2-3 days but may be up to one week. We will make every effort to ship your order as soon as possible.

Gas Range

Clear

Transmitter connects to any PureAire toxic or corrosive gas sensor
Plug & play sensor sets the transmitter gas & measurement range
Dual-level user-adjustable alarm relays
4- 20mA analog output (Active)
Built-in horn & visual alarm LEDs
Electronics continuously check the sensor & system status
Low-cost, long-life renewable sensor
Quick, easy sensor calibration
Optional remote cable for monitoring up to 30 feet from the transmitter
Connects to PLC or SCADA controller
UL, CUL, and CE Approvals
24V DC Power supply included
Available without a built-in horn – 99065. Please contact PureAire for ordering information: 847-726-6000

The PureAire Dichlorosilane Gas Detector is a compact gas monitor that’s ideal for protecting workers from toxic and corrosive gas exposure in the workplace. It consists of a generic transmitter/controller connected to a dedicated, renewable gas sensor that automatically inputs the gas and measurement range. Designed as a stand-alone monitor, the Dichlorosilane Gas Detector can also be connected to any programmable logic controller or SCADA system. PureAire also manufactures toxic gas detectors with a remote sensor.

The heart of the Dichlorosilane Gas Detector system is a smart, renewable, dichlorosilane sensor cell programmed with gas and measurement range information. When servicing the sensors, they can be recharged with fresh electrolyte and dynamically gas-calibrated in the maintenance shop away from the transmitter.

Sampling Method	Diffusion. (Optional: sensor can be remote up to 30 feet from the transmitter)
Other Available Gases	ammonia, bromine, chlorine, fluorine, hydrogen bromide, hydrogen chloride, hydrogen cyanide, hydrogen fluoride, hydrides, hydrazine, nitrogen dioxide, phosphine, and sulfur dioxide. For additional gases not listed here, please contactPureAire.
Accuracy	± 10% of full scale
Operating Temperature	-25 to +122F (-32 to +50C)
Sensor Type	Renewable electrochemical self-checking sensor with built-in microprocessor
Sensor Life	3 to 8 years under normal conditions
Gas concentration indicator	Built-in LCD digital display, (backlit) Displays: Gas Name & ppm concentration, AL1, AL 2, System Fault messages.
Signal Outputs	4-20 mA analog output (Active), Dual Level Alarm Relay Contacts
Power Requirements	24 VDC, .25 amp Regulated power supply required
Dimensions	5.12(W) x 8.25 (H) x 3.20 (D) inches; (120 x 209 x 81 mm)
Weight	1.2 lbs. (.5 kg)
Enclosure	Polycarbonate UL listed general-purpose, Optional NEMA 4X, IP 65 water-resistant (only available without built-in horn)
Country of Origin	USA
Harmonized Tariff Code	8531.10.0045

Low Annual Operation Cost

The PureAire Dichlorosilane Gas Detector offers the lowest annual maintenance cost of any gas detector on the market today. Our innovative renewable dichlorosilane sensors can be easily recharged with electrolyte in the field, at just 20% of the cost of traditional disposable sensors. With routine maintenance materials averaging just $70 per year, this detector can save your operation hundreds of dollars annually while maintaining superior safety standards.

True Stand-Alone Monitoring

Engineered for simplicity and independence, the PureAire Dichlorosilane Gas Detector operates as a fully self-contained system. Just mount it near your risk zone, plug it into any standard 115VAC or 220VAC power outlet, and it’s ready to go. The built-in horn and LED alarm indicators immediately warn personnel of hazardous gas levels. With dedicated alarm and fault relays for remote connectivity and a 4- 20mA analog output, the system seamlessly integrates into your existing PLC or SCADA infrastructure.

24/7 Self-Supervision for Maximum Peace of Mind

Equipped with advanced “smart” circuitry, the Dichlorosilane Gas Detector monitors itself around the clock. In the event of a system error, the analog output and fault relay instantly alert your control team. Maintenance is fast and efficient thanks to the microcontroller built directly into the sensor, allowing for easy removal and calibration without taking the entire system offline. Calibration data is stored right in the sensor and automatically transferred when reconnected to the transmitter, minimizing downtime and maximizing reliability.

Universal Gas Detector Literature

Universal Gas Detector Manual

Explosion-Proof EPU Gas Monitor Literature

Comparison PMS vs Disposable 1 pt

List of Gases We Can Detect