Trichlorosilane Gas Detector

$2,170.00

Product Summary

The PureAire Tri-Chlorosilane Fixed Gas Detector is built for continuous, real-time monitoring of trichlorosilane (HSiCl₃) gas. Utilizing a dedicated electrochemical sensor calibrated in parts-per-million (ppm), this system provides fast, reliable detection of leaks to help protect personnel and maintain safe operating conditions in high-risk environments.

Trichlorosilane is a key chemical used in the production of ultra-pure silicon for semiconductors and solar panels, particularly in chemical vapor deposition (CVD) processes. It’s also widely used in the manufacturing of silicone-based products and optical fibers. Highly reactive and volatile, trichlorosilane can release corrosive and flammable vapors upon exposure to air or moisture—making accurate gas detection essential in cleanrooms and processing areas.

PureAire’s trichlorosilane sensors are designed to perform for up to 8 years in standard controlled environments and can be recharged on-site with electrolyte, ensuring minimal maintenance and operational downtime.

For semiconductor fabs, solar cell manufacturers, and chemical processing facilities, PureAire offers a robust, low-maintenance trichlorosilane detection system that helps ensure safety, compliance, and process integrity.

Please note that because of the nature of this product, the lead time is typically 2-3 days but may be up to one week. We will make every effort to ship your order as soon as possible.

Gas Range

Clear

Transmitter connects to any PureAire toxic or corrosive gas sensor
Plug & play sensor sets the transmitter gas & measurement range
Dual-level user-adjustable alarm relays
4- 20mA analog output (Active)
Built-in horn & visual alarm LEDs
Electronics continuously checkthe sensor & system status
Low-cost, long-life renewable sensor
Quick, easy sensor calibration
Optional remote cable for monitoring up to 30 feet from the transmitter
Connects to PLC or SCADA controller
UL, CUL, and CE Approvals
24V DC Power supply included
Available without a built-in horn – 99065. Please contact PureAire for ordering information: 847-726-6000

The PureAire Trichlorosilane Gas Detector is a compact fixed gas monitor that’s ideal for protecting workers from toxic and corrosive gas exposure in the workplace. It consists of a transmitter/controller connected to a dedicated, renewable trichlorosilane gas sensor that automatically inputs the gas and measurement range. Designed as a stand-alone monitor, the Trichlorosilane Gas Detector can also be connected to any programmable logic controller or SCADA system. PureAire also manufactures toxic gas detectors with a remote sensor.

The heart of the Trichlorosilane Gas Detector is the smart, renewable sensor cell programmed with gas and measurement range information. When servicing the sensors, they can be recharged with fresh electrolyte and dynamically gas-calibrated in the maintenance shop away from the transmitter.

Sampling Method	Diffusion. (Optional: sensor can be remote up to 30 feet from the transmitter)
Other Available Gases	ammonia, bromine, chlorine, fluorine, hydrogen bromide, hydrogen chloride, hydrogen cyanide, hydrogen fluoride, hydrides, hydrazine, nitrogen dioxide, phosphine, and sulfur dioxide. For additional gases not listed here, please contact PureAire.
Accuracy	± 10% of full scale
Operating Temperature	-25 to +122F (-32 to +50C)
Sensor Type	Renewable electrochemical self-checking sensor with built-in microprocessor
Sensor Life	3 to 8 years under normal conditions
Gas concentration indicator	Built-in LCD digital display, (backlit) Displays: Gas Name & ppm concentration, AL1, AL 2, System Fault messages.
Signal Outputs	4-20 mA analog output (Active), Dual Level Alarm Relay Contacts
Power Requirements	24 VDC, .25 amp Regulated power supply required
Dimensions	5.12(W) x 8.25 (H) x 3.20 (D) inches; (120 x 209 x 81 mm)
Weight	1.2 lbs. (.5 kg)
Enclosure	Polycarbonate UL listed general-purpose, Optional NEMA 4X, IP 65 water-resistant (only available without built-in horn)
Country of Origin	USA
Harmonized Tariff Code	8531.10.0045

Maximum Efficiency, Minimum Maintenance

Protect your team and save on costs with the PureAire Trichlorosilane Gas Detector, which boasts the lowest annual maintenance costs of any gas monitoring system available. Unlike traditional sensors, PureAire’s renewable trichlorosilane sensors are easily recharged with electrolyte on-site, cutting maintenance costs to just 20% of disposable sensor systems. At an average of $70 in annual maintenance materials, you can save hundreds of dollars every year compared to expensive disposable sensors!

Hassle-Free Stand-Alone Monitoring

Simple and effective, the PureAire Trichlorosilane Gas Detector is designed to operate completely independently. Just mount it near the risk zone, plug it into a standard 115VAC or 220VAC outlet, and you’re up and running. The built-in horn and LED alarm indicators immediately alert your team to any dangerous conditions, ensuring rapid response to gas leaks.

Thanks to individual alarm and fault relays, you can easily connect remote alerts or control systems, while the 4–20mA analog output seamlessly integrates with your existing PLC or SCADA systems, providing continuous data for better monitoring and decision-making.

Intelligent, Always-On Protection

The PureAire Trichlorosilane Gas Detector is equipped with smart, self-supervising circuitry that works 24/7 to ensure reliability. If a system fault occurs, the detector instantly notifies your team via analog output and fault relay, so you can take action before a minor issue becomes a bigger problem.

Plus, with a dedicated microcontroller built directly into the sensor, routine calibration is a breeze. Simply detach the sensor, calibrate off-site, and plug it back in—all calibration data is automatically transferred to the transmitter for seamless operation.

Universal Gas Detector Literature

Universal Gas Detector Manual

Explosion-Proof EPU Gas Monitor Literature

Comparison PMS vs Disposable 1 pt

List of Gases We Can Detect