Trichlorosilane Gas Detector

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$2,385.00

Product Summary

The PureAire Tri-Chlorosilane Fixed Gas Detector is built for continuous, real-time monitoring of trichlorosilane (HSiCl₃) gas. Utilizing a dedicated electrochemical sensor calibrated in parts-per-million (ppm), this system provides fast, reliable detection of leaks to help protect personnel and maintain safe operating conditions in high-risk environments.

Trichlorosilane is a key chemical used in the production of ultra-pure silicon for semiconductors and solar panels, particularly in chemical vapor deposition (CVD) processes. It’s also widely used in the manufacturing of silicone-based products and optical fibers. Highly reactive and volatile, trichlorosilane can release corrosive and flammable vapors upon exposure to air or moisture—making accurate gas detection essential in cleanrooms and processing areas.

PureAire’s trichlorosilane sensors are designed to perform for up to 8 years in standard controlled environments and can be recharged on-site with electrolyte, ensuring minimal maintenance and operational downtime.

For semiconductor fabs, solar cell manufacturers, and chemical processing facilities, PureAire offers a robust, low-maintenance trichlorosilane detection system that helps ensure safety, compliance, and process integrity.

Please note that because of the nature of this product, the lead time is typically 2-3 days but may be up to one week. We will make every effort to ship your order as soon as possible.
  • Transmitter connects to any PureAire toxic or corrosive gas sensor
  • Plug & play sensor sets the transmitter gas & measurement range
  • Dual-level user-adjustable alarm relays
  • 4- 20mA analog output (Active)
  • Built-in horn & visual alarm LEDs
  • Electronics continuously checkthe  sensor & system status
  • Low-cost, long-life renewable sensor
  • Quick, easy sensor calibration
  • Optional remote cable for monitoring up to 30 feet from the transmitter
  • Connects to PLC or SCADA controller
  • UL, CUL, and CE Approvals
  • 24V DC Power supply included
  • Available without a built-in horn – 99065. Please contact PureAire for ordering information: 847-726-6000

The PureAire Trichlorosilane Gas Detector is a compact fixed gas monitor that’s ideal for protecting workers from toxic and corrosive gas exposure in the workplace. It consists of a transmitter/controller connected to a dedicated, renewable trichlorosilane gas sensor that automatically inputs the gas and measurement range. Designed as a stand-alone monitor, the Trichlorosilane Gas Detector can also be connected to any programmable logic controller or SCADA system. PureAire also manufactures toxic gas detectors with a remote sensor. 

The heart of the Trichlorosilane Gas Detector is the smart, renewable sensor cell programmed with gas and measurement range information. When servicing the sensors, they can be recharged with fresh electrolyte and dynamically gas-calibrated in the maintenance shop away from the transmitter.

 

Sampling Method Diffusion. (Optional: sensor can be remote up to 30 feet from the transmitter)
Other Available Gases ammonia, bromine, chlorine, fluorine, hydrogen bromide, hydrogen chloride, hydrogen cyanide, hydrogen fluoride, hydrides, hydrazine, nitrogen dioxide, phosphine, and sulfur dioxide. For additional gases not listed here,  please contact PureAire.
Accuracy ± 10% of full scale
Operating Temperature -25 to +122F (-32 to +50C)
Sensor Type Renewable electrochemical self-checking sensor with built-in microprocessor
Sensor Life 3 to 8 years under normal conditions
Gas concentration indicator Built-in LCD digital display, (backlit) Displays: Gas Name & ppm concentration, AL1, AL 2, System Fault messages.
Signal Outputs 4-20 mA analog output (Active), Dual Level Alarm Relay Contacts
Power Requirements

24 VDC

80 mA

Dimensions 5.12(W) x 8.25 (H) x 3.20 (D) inches; (120 x 209 x 81 mm)
Weight 1.2 lbs. (.5 kg)
Enclosure Polycarbonate UL-listed general-purpose
Country of Origin USA
Harmonized Tariff Code 8531.10.0045

Maximum Efficiency, Minimum Maintenance

Protect your team and save on costs with the PureAire Trichlorosilane Gas Detector, which boasts the lowest annual maintenance costs of any gas monitoring system available. Unlike traditional sensors, PureAire’s renewable trichlorosilane sensors are easily recharged with electrolyte on-site, cutting maintenance costs to just 20% of disposable sensor systems. At an average of  $70 in annual maintenance materials, you can save hundreds of dollars every year compared to expensive disposable sensors!

Hassle-Free Stand-Alone Monitoring

Simple and effective, the PureAire Trichlorosilane Gas Detector is designed to operate completely independently. Just mount it near the risk zone, plug it into a standard 115VAC or 220VAC outlet, and you’re up and running. The built-in horn and LED alarm indicators immediately alert your team to any dangerous conditions, ensuring rapid response to gas leaks.

Thanks to individual alarm and fault relays, you can easily connect remote alerts or control systems, while the 4–20mA analog output seamlessly integrates with your existing PLC or SCADA systems, providing continuous data for better monitoring and decision-making.

Intelligent, Always-On Protection

The PureAire Trichlorosilane Gas Detector is equipped with smart, self-supervising circuitry that works 24/7 to ensure reliability. If a system fault occurs, the detector instantly notifies your team via analog output and fault relay, so you can take action before a minor issue becomes a bigger problem.

Plus, with a dedicated microcontroller built directly into the sensor, routine calibration is a breeze. Simply detach the sensor, calibrate off-site, and plug it back in—all calibration data is automatically transferred to the transmitter for seamless operation.

Universal Gas Detector Literature

Universal Gas Detector Manual

Explosion-Proof EPU Gas Monitor Literature

Comparison PMS vs Disposable 1 pt

Gases We Detect

Calibration Cap for Gas Sensors

Calcap

Bulk Head Mount

BULKHEADSAMPLEMOUNT_02_01

Horn & Strobe

CloudConnect

8-Channel Programmable Controller for Oxygen, Carbon Dioxide, or Toxic/Combustible Gas Monitors

8-Channel Controller

Targeted Detection

Configured specifically for Trichlorosilane monitoring to support site safety programs.

Continuous Monitoring

Designed for around-the-clock detection to help identify leaks or unsafe conditions early.

Integration Ready

Built to fit typical facility alarm and monitoring workflows (local alerts and system integration).

Application Flexibility

Suitable for facilities including labs, manufacturing, and gas handling areas.

A toxic gas detector continuously monitors the air for harmful gases, including carbon monoxide, chlorine, ammonia, and hydrogen sulfide. It warns personnel before levels reach dangerous concentrations. Toxic gas detectors protect workers from low-level poisonous gases (in the ppm range) that can cause immediate or long-term health effects.

The most common include:
• Carbon monoxide (CO) – parking garages, boiler rooms
• Hydrogen sulfide (H₂S) – oil & gas, wastewater treatment
• Chlorine (Cl₂) – water treatment, chemical plants
• Ammonia (NH₃) – refrigeration, food processing
• Nitrogen dioxide (NO₂) – vehicle maintenance facilities
• Sulfur dioxide (SO₂) – power plants, refineries
• Ozone (O₃) – semiconductor, pharmaceutical industries
• Refrigerant gases (classified as A1, A2L, B2L, A3) – HVAC systems, supermarkets, cold storage, data centers

• Electrochemical sensors: Accurate, low-level detection; best for most toxic gases (CO, H₂S, Cl₂, NH₃).
• PID (Photoionization Detectors): Detects volatile organic compounds (VOCs) and low-level hydrocarbons.
• NDIR (Non-Dispersive Infrared): Used more often for CO₂ or gases that absorb infrared light. NDIR sensor cells are highly effective for detecting refrigerant gases across classifications A1, A2L, B2L, and A3.

• CO: 0–100 ppm, 0–1,000 ppm
• H₂S: 0–30 ppm, 0–200 ppm
• Cl₂: 0–1 ppm, 0–3 ppm, 0–10 ppm, 0–50 ppm, 0–200 ppm
• NH₃: 0–75 ppm, 0–100 ppm, 0–200 ppm, 0–300 ppm, 0–1,000 ppm
• NO₂: 0–2 ppm, 0–9 ppm, 0–15 ppm, 0–20 ppm
• SO₂: 0–15 ppm, 0–20 ppm
• O₃: 0–0.3 ppm, 0–1 ppm, 0–3 ppm, 0–300 ppm
• Refrigerant gases (A1, A2L, B2L, A3 classifications): 0–500 ppm, 0–1,000 ppm, 0–5,000 ppm

• Oil & gas: H₂S monitoring in drilling and refining
• Water/wastewater treatment: Chlorine and H₂S detection
• Food & beverage: Ammonia refrigeration monitoring
• Laboratories & pharma: VOC and toxic gas detection
• Manufacturing & automotive: CO and NO₂ monitoring
• Power generation: SO₂ monitoring in flue gas areas
• HVAC, supermarkets, cold storage & data centers: Refrigerant leak monitoring (A1, A2L, B2L, A3 gas classifications)

Consider:
• The specific gas hazards in your facility
• Sensor type (electrochemical, PID, NDIR, etc.) based on gas and concentration range
• Installation environment (indoor, outdoor, temperature/humidity conditions)
• Compliance needs (OSHA, IFC, local codes)
• Integration with alarms, PLCs, or cloud monitoring systems like PureAire’s CloudConnect

• Electrochemical sensors: Every 6–12 months
• PID sensors: Every 3–6 months
Always follow the manufacturer’s recommendation and perform bump tests for safety.

• LEL: Percentage of gas concentration at which ignition becomes possible. Combustible detectors typically measure 0–100% LEL.
• PPM (parts per million): A finer measurement, usually used for toxic gases rather than combustibles.

Yes, in most cases. Some gases, such as hydrogen sulfide (H₂S), carbon monoxide (CO), and ammonia (NH₃), pose toxic risks at very low concentrations (ppm levels) and combustible risks at higher concentrations (% LEL).
• A toxic gas detector is needed to protect worker health by alarming at ppm exposure limits set by OSHA and other agencies.
• A combustible gas detector is needed to prevent explosions or fires when gas levels approach the Lower Explosive Limit (LEL).

Since the alarm thresholds and sensor technologies differ, a single detector usually cannot provide both types of protection. Many facilities use both toxic and combustible gas detectors for full coverage, often integrated into a single safety system.  This system can activate building ventilation and advanced warning systems when gas levels reach dangerous concentrations.

If a gas is toxic at low ppm and combustible at higher % LEL, you may need dual detection — one detector set for ppm exposure, another for explosion hazard. Sensor selection depends on whether the primary risk is worker health, explosion, or both.