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PureAire Monitoring Systems Oxygen Monitor 888.788.8050


To manufacture the electronic parts in smartphones, digital cameras, laptops, and more, the semiconductor manufacturing industry relies on a number of inert gases. Nitrogen, HCL, Ammonia, Phosphine, HF, F2, and Cl2 are among the most common gases used in manufacturing plants. Some gases, like nitrogen, are used to purge chambers, while others are used in etching and deposition. All of these gases are colorless and odorless, so there is no way for employees to tell if there’s a leak.

These gases pose health hazards for semiconductor employees. For instance, nitrogen gas displaces oxygen from the environment. When room air does not contain enough oxygen, your employees will experience respiratory distress and even death. HF is severely corrosive and causes bad skin burns as well as death from fluid buildup in the lungs. OSHA standard 1910.119 addresses requirements for preventing or minimizing the consequences of catastrophic releases of toxic, reactive, flammable, or explosive chemicals that are commonly used in semiconductor manufacturing processes. These releases may result in toxic, fire, or explosion hazards.

To safeguard employees working in semiconductor facilities, invest in tools to monitor gas leaks. Oxygen detectors track ambient oxygen levels, sounding an alarm if levels drop. Toxic gas detectors check for leaks of specific gases, such as Phosphine or HF. By installing monitors throughout the site, you can protect employee health and comply with existing regulations. Browse toxic gas detectors and oxygen monitors now.