0-10ppm Oxygen Analyzer PureAire Product Photo

Trace Oxygen Analyzer, KF25, 0-10 ppm w/ 200ppb Lower Detectable Limit

Item #: 99201


Product Summary

PureAire’s Trace Oxygen Analyzer, KF25, 0-10 ppm is ideal for facilities requiring continuous monitoring of semiconductor tools, 3D printers, glove boxes, nitrogen gas lines, vacuum chambers, as well as any locations where there is little to no oxygen present. The unit’s sensor mounts directly into the process chamber with the use of a KF-type vacuum fitting. The analyzer is well suited for semiconductor tools, OLED manufacturers, 3D printing and, any industry applications where inert gases, including, but not limited to, nitrogen, helium, and argon are used in a vacuum. PureAire’s stable, long-life zirconium oxide sensor will last many years in maintained environments without needing to be replaced.

Stock Available
  • 0.01-10.00 PPM Oxygen Sensor
  • Accuracy ± 200 PPB of calibrated range
  • KF25 Flange Connector
  • Operates in a vacuum, 20 Torr or less
  • Leak rate if <1E-9 (or 1X10^-9) millibars (mb)/sec
  • Low Maintenance Zirconium Cell
  • 3-year warranty
  • 2 Alarm relays
  • No drift due to environmental or temperature changes
  • 24V DC Power supply included 

PureAire’s KF-25, 0-10ppm Trace Oxygen Analyzer is well suited for environments where little to no oxygen is present including semiconductor tools, wafer transfer tools, process chambers, cryogenic gloveboxes, nitrogen gas lines, 3D printers, and nitrogen generators.

The Trace Oxygen Analyzer comes with a 10-foot cable and a 10+ year zirconium oxide sensor, which can be placed inside the process or vacuum chamber for accurate readings. To monitor readings from outside, either connect the sensor using a 10-foot cable or K25 flange, then check readings and adjust the environment as necessary.


PureAire’s Trace Oxygen Analyzer can be used indoors or outdoors. Regardless of humidity, barometric pressure, or temperature changes, the oxygen analyzer performs reliably to safeguard your business. Even with a high electromagnetic field, this analyzer can provide stable, accurate readings.

PureAire Oxygen Analyzers use a zirconium oxide cell rather than an electrochemical sensor for increased reliability and longer-lasting performance. The zirconium oxide sensor lasts 10+ years with no scheduled maintenance. The zirconium oxide sensor responds in seconds to changes in oxygen levels, and will set off built-in audible and visual alarms notifying staff of low oxygen levels.

A KF-type vacuum fitting lets you mount the sensor directly into the vacuum chamber or into the load locks. By monitoring oxygen levels inside the vacuum, the Trace Oxygen Analyzer improves thru-put, since there’s no need to use an ambient environment as a medium for measuring oxygen levels.

Rather than disposable sensors, which must be calibrated regularly to perform up to specifications, the Trace Oxygen Analyzer saves time and money. Within three years, the sensor will pay for itself. Customers enjoy an average savings of $475 per year by installing the Trace Oxygen Analyzer instead of another product.


Sampling Method Diffusion Oxygen Monitor
(Supplied with KF-25 Fitting)
Gases Detected Oxygen (O2)
Range  0.01-10.00 PPM Oxygen
Accuracy ± 200 PPB of calibrated range
Operating Temperature -40 to +50 ºC
Display 3/4″ LCD Digital Display, Back Lit, 3 Alarms LED´s
Sensor Type Zirconium oxide
Sensor Life 10 years under normal operating conditions
Signal Outputs 4-20 mA Analog Output (Active)
Dual-Level Alarm Relay Contacts
Please contact PureAire for the available RS-485 option
Power Requirements 24 VDC
250 mA
Width 5.0 in
127 mm
Height 5.5 in
140 mm
Depth 3.25 in
83 mm
Weight 2.1 lb
0.9 kg
Enclosure Polycarbonate
Calibration Calibration is not required. Periodic span adjustment as needed.
Country of Origin USA
Harmonized Tariff Code 8531.10.0045
Additional O2 Monitor Accessories List Price
8 Channel Controller $2,795.00 US (P/N # 99058)
Horn and Strobe  $170.00 US (P/N # 42002)

Connects to DCS and PLC Controls

The Trace Oxygen Analyzer transmits readings directly to a distributive control system or a programmable logic controller, so you can easily check oxygen concentration levels inside the vacuum.

PureAire’s Oxygen Sensor Cell

Unlike other zirconium cells, which need a reference gas to provide readouts, the Trace Oxygen Analyzer can operate without a reference gas. The Current Limiting Zirconium Oxide Oxygen sensor is superior at detecting low levels of oxygen, and it can be used in environments that contain no oxygen, for instance, 100 percent nitrogen environments. While other oxygen deficiency monitors may require semi-annual (or even more frequent) tunes-ups to work properly, PureAire’s Trace Oxygen Monitor provides constant monitoring, with no calibration required. A simple, periodic span adjustment may be necessary.  An optional nitrogen or argon challenge can be conducted for peace of mind.

Trace O2 Monitor System Features

The Trace O2 Analyzer comes in different configurations. Choose between the simple display-only monitor or a fully-featured monitor that comes with user-selectable alarms. No matter which display you choose, you’ll enjoy a sophisticated CPU, reliable performance, and peace of mind.

Trace Oxygen Analyzer 0-10.00 ppm Literature

Trace Oxygen Analyzer 0-10.00 ppm Manual

Low O2 Repeatability ppb KF25 Test Data

Safety Risks of Oxygen Deficiency

NIH – Protocol for Use & Maintenance of Oxygen Monitoring Devices 2021

Oxygen Analyzer for 3D Printers- Additive Manufacturing

How to Install O2 Sensor into a 3D Direct Metal Printer (DMP)

How to Install O2 Sensor in 3D Direct Metal Printer 

Oxygen Monitor Sales Presentation

Horn/strobe 24VDC Red p/n 42002

horn and strobe

8 Channel Programmable Controller for O2 or Gas Monitors